The semiconductor industry has high standards when it comes to performance for automation solutions. Only components tailored to each specific requirement can safely and reliably perform motion tasks under vacuum, controlled atmospheric, and cleanroom conditions. From extremely slow to highly-dynamic motion: the range of automation tasks is expansive and requires the highest degree of precision and repetition accuracy down to the nanometer range. Machine manufacturers require solutions that offer the maximum possible degree of freedom through open structures. Multi-technological system solutions from Rexroth reduce complexity in engineering, assembly, and during commissioning. Variants specially developed for the semiconductor industry meet the industry's requirements for standardized platforms.
Rexroth's product portfolio includes a wide range of drives for rotational servo and stepping motors as well as a broad spectrum of direct drives. Ironless linear motors specially developed for the semiconductor industry come in five sizes with graded lengths and cover a wide range of powers and speeds.
Rexroth provides motion control systems with an open architecture and compact drives to meet users' control needs. Their universal encoder interface allows them to work seamlessly with a variety of measuring systems. Rexroth delivers the motors as ready-to-install axes complete with aligned linear guides, length measuring systems, and drive controllers.
Rexroth features a comprehensive selection of profile rails and runner blocks. Precise manufacturing with compatible accuracy and preload levels makes it possible to provide extensive combinations and flexibility in all designs. That allows for the combination of any runner blocks and rails of the same size and based on the same technology. Corrosion-resistant and cleanroom-suitable models can be used for standardization across all process steps. Just as with all its technologies, Rexroth uses detailed scalability in linear technology and has developed an extensive range of miniature and high-precision guides for the semiconductor industry. Precision modules are responsible for the highly-dynamic motion of small masses in the smallest spaces as ready-to-install linear systems. The integrated ball screw drive with zero-clearance nut system guarantees exceptional positioning and repetitive accuracy.
Rexroth's pneumatics portfolio is comprised of a wide range of actuators, valve terminal systems and compressed air treatment systems. These components can be integrated into a wide variety of automation environments via bus modules to all conventional control communication systems. A number of positioning, rotating and gripping modules allow for extensive flexibility when it comes to working with components. Only Rexroth offers dimension-identical pneumatic and electrical actuators with positive-locking Easy-2-Combine connection technology. That makes it easy to exchange the two technologies without having to interfere with the basic construction.
Rexroth will be an exhibitor at SEMICON West 2012, booth 2107.
Bosch Rexroth AG is one of the world's leading specialists in the field of drive and control technologies. Under the Rexroth brand name, the company supplies more than 500,000 customers with tailored solutions for driving, controlling, and moving. Bosch Rexroth is a partner for Mobile Applications, Machinery Applications and Engineering, Factory Automation and Renewable Energies. The company provides customized solutions tailored to the needs and specifications of each individual market. As The Drive & Control Company, Bosch Rexroth develops, produces, and sells components and systems in over 80 countries. As part of the Bosch Group, Bosch Rexroth and its 38,400 associates generated approximately 6.4 billion euros in revenue in 2011.
To learn more, please visit www.boschrexroth-us.com
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